Ultrahigh Purity IGC II Integrated Gas Components
Ultrahigh-Purity IGC® II Integrated Gas Components
The Swagelok® IGC II system consists of lightweight, easy-to-assemble components and standard hardware customizable for any flow configuration. Metal seals help prevent the absorption or permeation of gas, making the system an ideal ultrahigh-purity solution. Complimentary IGC II System Configurator tool simplifies component selection, layout, and ordering.
A typical IGC II system consists of three layers—a substrate assembly, a manifold assembly, and mounting components.
- The substrate assembly provides the flow path for the process gas through the gas stick
- The manifold assembly provides the flow path between two or more parallel gas sticks
- The substrate-manifold assembly accepts any 1.5 in. (38.1 mm) C-ring surface-mount component
- A conversion plate provides the mounting capacity for a mass flow controller, and a tube port is available to provide a 1/4 in. vertical tube port on a manifold or substrate
Surface-Mount Components
- Low-pressure diaphragm valves, DP series
- Bellows-sealed metering valves, BM series
- Atomic layer deposition valves, ALD valves
- High-flow regulators, HF series
- Ultrahigh-purity pressure gauges, PGU series
- Ultrahigh-purity pressure transducers, PTU series
Gaskets and Gasket Assemblies
Specifications
- C-ring style seal for a 1.5 in. (38.1 mm) modular system
- 316L stainless steel material of construction
- Helium leak-tight integrity to less than 1 × 10–9 std cm3/s
Substrate/Manifold
Specifications
| Pressure Rating at 70°F (20°C) | 3000 psig (206 bar) |
| Temperature Rating | 248°F (120°C) operating 302°F (150°C) bakeout |
| Wetted Materials | 316L VIM-VAR stainless steel |
| Internal Surface Finish | 5 µin. (0.13 µm) Ra |
Discover more about how Swagelok products can work for you. Browse our catalogs or locate a sales and service center.
"Safe Product Selection:
The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.
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